METHOD OF MANUFACTURING SOLAR CELL, AND SOLAR CELL
PROBLEM TO BE SOLVED: To provide a method of manufacturing a solar cell as well as the solar cell.SOLUTION: A method of manufacturing a solar cell includes a step of forming a first conductive type doping part on a semiconductor substrate, a step for primary formation of an oxide layer on the semico...
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Zusammenfassung: | PROBLEM TO BE SOLVED: To provide a method of manufacturing a solar cell as well as the solar cell.SOLUTION: A method of manufacturing a solar cell includes a step of forming a first conductive type doping part on a semiconductor substrate, a step for primary formation of an oxide layer on the semiconductor substrate, a step for primary pattern formation of the oxide layer and then formation of a plurality of recesses on the semiconductor substrate, a step for secondary formation of the oxide layer further on the semiconductor substrate, a step for secondary pattern formation of the oxide layer and for forming a second conductive type doping part on the semiconductor substrate where the recess has been formed, and a step for forming a first conductive type electrode connected to the first conductive type doping part on the semiconductor substrate and forming a second conductive type electrode connected to the second conductive type doping part. The first conductive type doping part is separated from the second conductive type doping part by the oxide layer. |
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