PROCESS LIQUID EXCHANGE METHOD AND SUBSTRATE PROCESSING APPARATUS

PROBLEM TO BE SOLVED: To provide a method for decreasing the consumption of a process liquid in a substrate processing apparatus during process liquid exchange.SOLUTION: A substrate processing apparatus includes an accumulation tank accumulating a process liquid, and a circulation line whose both en...

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Bibliographische Detailangaben
Hauptverfasser:	KASAHARA MASATOSHI, SHIMOMURA SHINICHIRO
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CONVEYING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HANDLING THIN OR FILAMENTARY MATERIAL MACHINES, APPARATUS OR DEVICES FOR, OR METHODS OF, PACKAGINGARTICLES OR MATERIALS PACKING PERFORMING OPERATIONS SEMICONDUCTOR DEVICES STORING TRANSPORTING UNPACKING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a method for decreasing the consumption of a process liquid in a substrate processing apparatus during process liquid exchange.SOLUTION: A substrate processing apparatus includes an accumulation tank accumulating a process liquid, and a circulation line whose both ends are connected with the accumulation tank and in which the process liquid circulates, and performs liquid treatment on a substrate using the process liquid through a branch conduit line connected with the circulation line. A process liquid exchange method for exchanging the process liquid of the substrate processing apparatus includes: a process liquid drainage step where the process liquid in the accumulation tank is drained; a gas purge step where a purge gas is supplied to the circulation line to discharge the process liquid remaining in the circulation line from the circulation line; and a process liquid supply step where the process liquid is supplied to the accumulation tank.