LIGHT CONTROL DEVICE AND LIGHT CONTROL METHOD, LASER PROCESSING SYSTEM, AND PROCESSING METHOD BY THE LASER PROCESSING SYSTEM
PROBLEM TO BE SOLVED: To provide a light control device and a laser processing system or the like which can optionally control a light irradiation pattern on an irradiated object, and preferably, can optionally control light intensity distribution in the light irradiation pattern.SOLUTION: A light c...
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Zusammenfassung: | PROBLEM TO BE SOLVED: To provide a light control device and a laser processing system or the like which can optionally control a light irradiation pattern on an irradiated object, and preferably, can optionally control light intensity distribution in the light irradiation pattern.SOLUTION: A light control device includes: a lens which collects and diverts incident light containing linear polarized light; a polarizing means formed of a half-wavelength plate, which optionally changes a polarization direction of light from the lens; and a birefringent element which divides the light from the half-wavelength plate into at least two. Preferably, the birefringent element is a cartridge which can be replaced with other birefringent element having a different optical property, and the half-wavelength plate can be rotated with respect to an optical axis or can be inclined in an optical axis direction. |
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