PATTERN FORMATION METHOD, PATTERN FORMATION DEVICE, TEMPLATE AND TEMPLATE INSPECTION METHOD

PROBLEM TO BE SOLVED: To provide a pattern formation method, a pattern formation device, a template and a template inspection method capable of accurately recognizing a state of an uneven pattern of the template.SOLUTION: In a pattern formation method, a template which includes a base material havin...

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Bibliographische Detailangaben
1. Verfasser: TOKUE HIROSHI
Format: Patent
Sprache:eng
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