WAFER HOLDER, FILM FORMATION DEVICE, AND FILM FORMATION METHOD

WAFER HOLDER, FILM FORMATION DEVICE, AND FILM FORMATION METHOD

PROBLEM TO BE SOLVED: To provide a wafer holder capable of suppressing warpage thereof, a film formation device, and a film formation method.SOLUTION: A wafer holder according to the present invention is a wafer holder on which a wafer is mounted, and includes a front face recessed part formed on th...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser: OCHI JUNJI
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:PROBLEM TO BE SOLVED: To provide a wafer holder capable of suppressing warpage thereof, a film formation device, and a film formation method.SOLUTION: A wafer holder according to the present invention is a wafer holder on which a wafer is mounted, and includes a front face recessed part formed on the front face of the wafer holder and accommodating the wafer, and a rear face recessed part formed on the rear face of the wafer holder and accommodating the wafer.