METHOD FOR PRODUCING ALKOXYLATED PHENOL RESIN-TYPE CROSSLINKING AGENT

PROBLEM TO BE SOLVED: To provide a method for producing an alkoxylated phenol resin-type crosslinking agent for photoresist, not damaging the crosslinking agent property, having a high sensitivity, and being excellent in the alkali solubility property and the film property of a cured film.SOLUTION:...

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Bibliographische Detailangaben
Hauptverfasser: KOBAYASHI DAIKI, KITANO SATOSHI, UMINO YOHEI, MARUYAMA KATSUHIRO
Format: Patent
Sprache:eng
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