METHOD FOR PRODUCING ALKOXYLATED PHENOL RESIN-TYPE CROSSLINKING AGENT

PROBLEM TO BE SOLVED: To provide a method for producing an alkoxylated phenol resin-type crosslinking agent for photoresist, not damaging the crosslinking agent property, having a high sensitivity, and being excellent in the alkali solubility property and the film property of a cured film.SOLUTION:...

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Hauptverfasser:	KOBAYASHI DAIKI, KITANO SATOSHI, UMINO YOHEI, MARUYAMA KATSUHIRO
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CHEMISTRY CINEMATOGRAPHY COMPOSITIONS BASED THEREON ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONSONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS MATERIALS THEREFOR METALLURGY ORGANIC MACROMOLECULAR COMPOUNDS ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES THEIR PREPARATION OR CHEMICAL WORKING-UP
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Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a method for producing an alkoxylated phenol resin-type crosslinking agent for photoresist, not damaging the crosslinking agent property, having a high sensitivity, and being excellent in the alkali solubility property and the film property of a cured film.SOLUTION: A method for producing an alkoxylated phenol resin-type crosslinking agent includes (I) heating alkylphenols and aldehydes in a solvent in the presence of a basic catalyst to produce a resol resin containing repeating units of formulae (A) and (B), and (II) further adding an alcohol and an acid catalyst and heating the mixture to convert ≥95 mol% of an alkanol group of the repeating unit (B) to an alkoxyalkyl group.