SUPERCONDUCTING MULTILAYER STRUCTURE THIN FILM

PROBLEM TO BE SOLVED: To provide a superconducting thin film structure suitable for filter applications not requiring advanced deposition device or technique, by producing a superconducting thin film mixing c-axis growth and a-axis growth without providing an extra buffer layer on a c-axis epitaxial...

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Bibliographische Detailangaben
Hauptverfasser: SATO RYOSUKE, NAKAMURA TETSUSHIGE, TSUCHIYA TETSUO, SOMA MITSUGI, TERAO KATSUHIRO, KITADA NORITAKA, YAMAGUCHI IWAO
Format: Patent
Sprache:eng
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Zusammenfassung:PROBLEM TO BE SOLVED: To provide a superconducting thin film structure suitable for filter applications not requiring advanced deposition device or technique, by producing a superconducting thin film mixing c-axis growth and a-axis growth without providing an extra buffer layer on a c-axis epitaxial growth superconducting thin film provided on a substrate, and to provide a manufacturing method therefor.SOLUTION: The superconducting thin film structure is provided by laminating a superconducting thin film, mixing c-axis growth and a-axis growth of the same chemical material as a c-axis epitaxial growth superconducting material, on a c-axis epitaxial growth superconducting thin film formed on a substrate, with no buffer layer interposed therebetween.