DISPOSING METHOD OF BACKUP PIN AND RETURNING METHOD OF BACKUP PIN

PROBLEM TO BE SOLVED: To provide a disposing method of backup pins and returning method of the backup pins disposed at predetermined positions capable of increasing the efficiency of disposing or returning work of the backup pins.SOLUTION: A substrate backup mechanism has a backup base 21 including: a backup area A1 in which backup pins 22 are placed at any positions; a pre-disposing temporary placing area A2 in which plural backup pins 22 are temporarily placed before being disposed; and a post-return temporary placing area A3 in which plural returned backup pins 22 are temporarily placed. A temporary placing position TP for the backup pins 22 in the pre-disposing temporary placing area A2 and the post-return temporary placing area A3 are previously allotted and movement order is set while considering the conditions to avoid interference of the backup pins 22 according to the disposing position AP of the backup pins 22 in the backup area A1.