CONDUCTIVE SHEET AND SUBSTRATE INSPECTING DEVICE
PROBLEM TO BE SOLVED: To sufficiently secure a compression amount while maintaining an electrical conduction state, and sufficiently secure durability.SOLUTION: A conductive sheet 3 is arranged between an electrode formation surface 13 formed electrodes 12 in a substrate 11 and probes 32 arranged in...
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Sprache: | eng |
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Zusammenfassung: | PROBLEM TO BE SOLVED: To sufficiently secure a compression amount while maintaining an electrical conduction state, and sufficiently secure durability.SOLUTION: A conductive sheet 3 is arranged between an electrode formation surface 13 formed electrodes 12 in a substrate 11 and probes 32 arranged in an inspecting head 4, corresponding to the electrodes 12, respectively. In portions compressed by being sandwiched between the electrodes 12 and the probes 32 corresponding to the electrodes 12, in which conductive particles 22 and 23 are dispersed in an insulating layer 21 composed of elastomer, conductivity is developed in a thickness direction. The conductive particles 22 dispersed in the surface of the insulating layer 21 are composed of metal particles, and the conductive particles 23 dispersed in the inside of the insulating layer are composed by forming a conductive plating layer 23b on the surfaces of elastomer particles 23a. |
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