PLASMA PROCESSING SYSTEM COMPONENT ANALYSIS SOFTWARE AND METHOD AND SYSTEM FOR CREATING THE SAME

PROBLEM TO BE SOLVED: To provide a method for creating plasma processing system component analysis software.SOLUTION: Component specifications are defined. Each of the components implements at least one of a user-interface function, a logic operation function, an input function, and an output function for analyzing a plasma processing system component. A plurality of components are selected from a component panel of a visual integrated design editor architecture (VIDEA), thereby causing the plurality of components to be disposed in a layout format in the VIDEA. Properties of each of the plurality of components are specified by performing at least one of selecting from predefined properties and defining parameters for the properties. The plurality of components are saved in a mark-up language configured to be executable by a browser.