SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF THE SAME

PROBLEM TO BE SOLVED: To inhibit manufacturing variation in metal wiring resistance of a semiconductor device.SOLUTION: A semiconductor device comprises a metal wiring resistance formed in a first region and a plurality of via resistance formed in a second region in the same layer with the first reg...

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Bibliographische Detailangaben
1. Verfasser: KUMAMOTO KEITA
Format: Patent
Sprache:eng
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