FILM-FORMING APPARATUS

PROBLEM TO BE SOLVED: To provide a film-forming apparatus wherein a detection function for detecting the presence or absence of target matter within a film-forming chamber can be secured.SOLUTION: The film-forming apparatus 1 is equipped with: an anti-deposition pipe 20 having bent portions 20d and 20e and a hollow part S that communicates the interior and the exterior of the film-forming chamber 2; a light projection part 21 that is installed outside the film-forming chamber 2 and passes a sensor light through the hollow part S of the anti-deposition pipe 20 to detect the presence or absence of a tray T inside the film-forming chamber 2; a partition glass 22 that transmits the sensor light and is installed between a tip of the anti-deposition pipe 20 located outside the film-forming chamber 2 and the light projection part 21; and mirrors 23 and 24 that are placed inside the hollow part S of the anti-deposition pipe 20 at the bent portions 20d and 20e of the anti-deposition pipe 20 so as to change the direction of a light axis L of the sensor light projected by the light projection part 21.