SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
PROBLEM TO BE SOLVED: To provide a semiconductor device capable of being manufactured with ease, and that uses a nitride semiconductor having a gate insulating film and whose gate threshold voltage is positive.SOLUTION: A semiconductor device comprises: a nitride semiconductor layer formed on a subs...
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Zusammenfassung: | PROBLEM TO BE SOLVED: To provide a semiconductor device capable of being manufactured with ease, and that uses a nitride semiconductor having a gate insulating film and whose gate threshold voltage is positive.SOLUTION: A semiconductor device comprises: a nitride semiconductor layer formed on a substrate; an insulating film formed on the nitride semiconductor layer; a semiconductor film formed on the insulating film; and an electrode formed on the semiconductor film. The semiconductor film contains fluorine. |
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