SUBSTRATE HOLDER, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

PROBLEM TO BE SOLVED: To provide a substrate holder or substrate table on which one or more heaters and/or temperature sensors are formed, for example.SOLUTION: Provided is a substrate holder for use in a lithographic apparatus. The substrate holder comprises a main body, a plurality of burls, and heaters and/or temperature sensors. The main body has a surface. The plurality of burls protrude from said surface and each have an end face to support a substrate. The heaters and/or temperature sensors are provided on the main body surface. The substrate holder is configured such that, when the substrate is supported on the end face, the heat conduction between the heaters and/or temperature sensors and the substrate is larger than the heat conduction between the heaters and/or temperature sensors and the main body surface.