DRIFT CONTROL IN CHARGED PARTICLE BEAM SYSTEM

PROBLEM TO BE SOLVED: To provide a method and apparatus for reducing drift in a charged particle beam system.SOLUTION: The method for reducing drift in a charged particle beam system includes: providing a charged particle beam column including a charged particle beam, a lens system, and a sample cha...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	JOHANNES ANTONIUS MARIA VAN DEN OETELAAR, CASPER MARIA SMIT
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
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