DRIFT CONTROL IN CHARGED PARTICLE BEAM SYSTEM

PROBLEM TO BE SOLVED: To provide a method and apparatus for reducing drift in a charged particle beam system.SOLUTION: The method for reducing drift in a charged particle beam system includes: providing a charged particle beam column including a charged particle beam, a lens system, and a sample chamber; disposing a temperature-controlled device between the lens system and the sample chamber to control heat transfer between the lens system and the sample chamber; and controlling the temperature of the temperature-controlled device to reduce or eliminate the thermal drift of the position of a sample within the sample chamber relative to the position of the charged particle beam.