STAGE SYSTEM AND LITHOGRAPHY DEVICE

PROBLEM TO BE SOLVED: To provide a stage system capable of realizing a high acceleration speed without slippage between an object table and an object table support.SOLUTION: A movable stage system is configured to support an object. A stage system comprises an object table supporting the object, and...

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Bibliographische Detailangaben
Hauptverfasser:	YAN-SHAN HUANG, SANDER CHRISTIAAN BROERS, PETER LAURENTIUS MARIA ROS, ANTONIUS FRANCISCUS JOHANNES DE GROOT, LAFARRE RAYMOND WILHELMUS LOUIS
Format:	Patent
Sprache:	eng
Schlagworte:	ACCESSORIES THEREFOR APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USINGWAVES OTHER THAN OPTICAL WAVES APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FORPROJECTING OR VIEWING THEM APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a stage system capable of realizing a high acceleration speed without slippage between an object table and an object table support.SOLUTION: A movable stage system is configured to support an object. A stage system comprises an object table supporting the object, and an object table support defining an object table support face supporting the object table. The object table support is provided with at least one first actuator for driving the object table support in a first driving direction substantially parallel to the object table support face. Under an influence on a plane parallel to the object table support face, at least one actuator is spaced from the object table in a direction orthogonal to the first driving direction to reduce a risk of slippage between the object table support and the object table supported on it.