THIN FILM SOLAR CELL MANUFACTURING METHOD AND MANUFACTURING DEVICE

PROBLEM TO BE SOLVED: To form plural separation grooves at high position accuracy.SOLUTION: Plural first separation grooves 1 are formed in a predetermined number of processed ranges 31A-31E on a first layer accumulated on a substrate 10 using the predetermined number of first laser heads correspond...

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Bibliographische Detailangaben
Hauptverfasser:	HIRATA SHIGEO, KAMIKUBO NORITAKA
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CLADDING OR PLATING BY SOLDERING OR WELDING CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR PERFORMING OPERATIONS SEMICONDUCTOR DEVICES SOLDERING OR UNSOLDERING TRANSPORTING WELDING WORKING BY LASER BEAM
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To form plural separation grooves at high position accuracy.SOLUTION: Plural first separation grooves 1 are formed in a predetermined number of processed ranges 31A-31E on a first layer accumulated on a substrate 10 using the predetermined number of first laser heads corresponding to the processed ranges 31A-31E one to one, and alignment parts MA-ME and NA-NE are provided in the processed ranges 31A-31E, respectively. A second layer 12 is deposited on the first layer on which the plural first separation grooves 1 are formed. Plural second separation grooves 2 are formed on the second layer 12 using plural second laser heads 22A-22E. The plural second separation grooves 2 are formed along each of the plural first separation grooves 1 formed in one processed range 31A on the basis of positions of the alignment parts MA and NA formed in one processed range 31A.