SYSTEM, METHOD AND COMPUTER PROGRAM PRODUCT FOR CLASSIFICATION WITHIN INSPECTION IMAGES

PROBLEM TO BE SOLVED: To provide a system and a method for classification within inspection images.SOLUTION: In accordance with an aspect of a subject matter disclosed in the present invention, there is provided an analysis system for classifying possible defects identified within an inspection imag...

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Bibliographische Detailangaben
Hauptverfasser:	AMIT BATIKOFF, ADI DAFNI, MICHELE DALLA-TORRE, GIL SHABAT
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CALCULATING COMPUTING COUNTING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY IMAGE DATA PROCESSING OR GENERATION, IN GENERAL INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS SEMICONDUCTOR DEVICES TESTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a system and a method for classification within inspection images.SOLUTION: In accordance with an aspect of a subject matter disclosed in the present invention, there is provided an analysis system for classifying possible defects identified within an inspection image of an inspected object. The system comprises: a pattern matcher configured to determine an anchor location with respect to the inspection image on the basis of matching of a template and a portion of the inspection image, accuracy of the determining of the anchor location exceeding a resolution of the inspection image; a distribution analysis module configured to determine, on the basis of the anchor location and a mask which defines different segments within an area, a distribution of a potential defect with respect to one or more of the segments; and a classifier configured to classify the potential defect on the basis of the distribution.