CONTACT PROBE AND SEMICONDUCTOR ELEMENT SOCKET PROVIDED WITH THE SAME
PROBLEM TO BE SOLVED: To provide a contact probe and a semiconductor element socket provided with the same which correct unevenness in a contact position between an electrode part of a semiconductor element and a contactor of a plunger, allow them to contact evenly, suppress an increase in contact r...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | PROBLEM TO BE SOLVED: To provide a contact probe and a semiconductor element socket provided with the same which correct unevenness in a contact position between an electrode part of a semiconductor element and a contactor of a plunger, allow them to contact evenly, suppress an increase in contact resistance of the contactor with the electrode part of the semiconductor element, and smoothly and excellently performs inspection of the semiconductor element by stably contacting the contactor to the electrode part.SOLUTION: The contact probe 11 is provided with a columnar contactor 13 with which a solder ball 71 to be an electrode part of the semiconductor element is in contact. The contactor 13 has a plurality of sharp-pointed parts 17 which are chevron-shaped and deformable elastic contactors at the end of a base part 15. The sharp-pointed parts 17 have contact parts 18 for holding the solder ball 71 and a guide part 19 for guiding a central axis C1 of the contactor 13 toward a central axis C0 of the solder ball 71 on the end side of the respective contact parts 18. |
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