METHOD FOR MANUFACTURING HERMETICALLY SEALED MICRO DEVICE

PROBLEM TO BE SOLVED: To provide a method for manufacturing a high quality hermetically sealed micro device, in which a structure that enlarges an effective surface area and exerts a high getter action is easily achieved at a low cost, and a high degree of vacuum is maintained over a long period in...

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Bibliographische Detailangaben

1. Verfasser:	FUSE AKIHIRO
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS SEMICONDUCTOR DEVICES TRANSPORTING
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