ROBOT ARM STRUCTURE AND ROBOT
PROBLEM TO BE SOLVED: To provide a robot arm structure capable of reducing a device cost, and a robot.SOLUTION: An arm structure of a robot includes a first arm part, a second arm part, and an end effector configured to hold a workpiece, a partitioning wall, and an airtight terminal. The first arm p...
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Zusammenfassung: | PROBLEM TO BE SOLVED: To provide a robot arm structure capable of reducing a device cost, and a robot.SOLUTION: An arm structure of a robot includes a first arm part, a second arm part, and an end effector configured to hold a workpiece, a partitioning wall, and an airtight terminal. The first arm part is provided with a specified drive system arranged in an inside of the first arm, and the inside of the first arm is kept in an atmospheric pressure state. The second arm has no drive system therein. A partitioning wall is provided near a connecting portion of the first arm part and the second arm part to isolate the atmospheric pressure state maintained within the first arm part from the depressurized state. The airtight terminal is provided in the partition wall to electrically interconnect an atmosphere side and a vacuum side in an airtight state. |
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