SAMPLE ANALYZER

PROBLEM TO BE SOLVED: To provide a sample analyzer by which section information on a cross section is immediately acquired without performing an operation such as transfer of a sample stage, etc. after forming the cross section on a sample.SOLUTION: In a sample analyzer which includes: an electronic beam barrel 7; an ion beam barrel 17: and control means 25 and 23, a cutting work of a sample 9 is performed by irradiation of an ion beam 15, a cross section of the sample 9 exposed by the cutting work is used as an analysis object surface, the cross section is irradiated with an electronic beam 5, section information on the sample 9 is detected by irradiation of the electronic beam 5, setting of a scan rotation amount of ion beam scan in ion beam irradiation to the sample 9 is made possible by the control units 25 and 23 so that the cross section which becomes a predetermined inclination angle to the surface orthogonal to an optical axis 6 of the electronic beam 5 is formed on the sample 9, and a detector 18 for detecting the section information on the sample 9 is placed on the front surface side to the cross section formed on the sample 9 by the ion beam scan based on the scan rotation amount.