ALUMINUM NITRIDE SINTERED COMPACT AND METHOD FOR PRODUCING THE SAME
PROBLEM TO BE SOLVED: To provide an aluminum nitride sintered compact containing no sintering aid including a group 3A oxide and having small surface roughness even when processed by grinding work, and a method for producing the same.SOLUTION: There is provided the anti-corrosive aluminum nitride si...
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Zusammenfassung: | PROBLEM TO BE SOLVED: To provide an aluminum nitride sintered compact containing no sintering aid including a group 3A oxide and having small surface roughness even when processed by grinding work, and a method for producing the same.SOLUTION: There is provided the anti-corrosive aluminum nitride sintered compact with ≥99% purity, having 3.20×10kg/mdensity and containing ≥200 ppm and ≤400 ppm Ca, ≥10 ppm and ≤100 ppm Si and ≥220 ppm and ≤1,500 ppm C. The aluminum nitride sintered compact does not contain the sintering aid including the group 3A oxide, and contains Ca which is a densification-promoting material, and Si and C which are densification-inhibiting materials in each predetermined amount. Thus, the surface roughness of the aluminum nitride sintered compact can be reduced on a ground surface. As the result, anti-corrosive properties of the aluminum nitride sintered compact can be improved, and the surface area of the ground surface becomes smaller. |
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