VIBRATION TYPE GYRO WITH HIGH ACCURACY
PROBLEM TO BE SOLVED: To provide a vibration type gyro including a structure capable of reducing a bias output by correcting a quadrature error.SOLUTION: In a vibration type gyro, a Y direction component can be electrically detected as a quadrature error because capacitance between a drive mass body...
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Zusammenfassung: | PROBLEM TO BE SOLVED: To provide a vibration type gyro including a structure capable of reducing a bias output by correcting a quadrature error.SOLUTION: In a vibration type gyro, a Y direction component can be electrically detected as a quadrature error because capacitance between a drive mass body 6 and a fixed electrode 24 varies when the Y direction component is included in drive vibration. Since an initial capacitance between the drive mass body 6 and the fixed electrode 24 is different from an initial capacitance between electrodes for angular velocity detection, and a magnitude of each quadrature error is also different from each other, an output signal from which a quadrature error is subtracted can be obtained by converting respective capacitance variations into voltages by a C-V conversion circuit, adjusting the voltages by a variable amplifier so as to make the amplitudes of the voltages equal, making respective phases equal, and outputting the difference. |
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