SAMPLE EVALUATION DEVICE AND SAMPLE EVALUATION METHOD

PROBLEM TO BE SOLVED: To easily measure constituent fluctuation of a metal oxide film in a sample evaluation device and a sample evaluation method.SOLUTION: The sample evaluation method has the steps of: acquiring from a scanning nonlinear dielectric microscope 10 an output signal Sshowing nonlinear...

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1. Verfasser: SAWAI NOBUHIRO
Format: Patent
Sprache:eng
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Zusammenfassung:PROBLEM TO BE SOLVED: To easily measure constituent fluctuation of a metal oxide film in a sample evaluation device and a sample evaluation method.SOLUTION: The sample evaluation method has the steps of: acquiring from a scanning nonlinear dielectric microscope 10 an output signal Sshowing nonlinear dielectric constant of an evaluation area F by scanning the evaluation area F of a metal oxide film 35 by a probe 14a of the scanning nonlinear dielectric microscope 10; and obtaining misalignment X corresponding to the acquired output signal Sby referring to a table TB showing a relation between the misalignment X of a specific constituent element of the metal oxide film 35 and the output signal S.