METHOD FOR MAKING SEMICONDUCTOR LIGHT DETECTION DEVICES

PROBLEM TO BE SOLVED: To provide: a method for making semiconductor light detection devices, such as solar cells and photodetectors, which minimizes exposure of a front surface field region to contaminants and assures metal-to-cap region alignment so that top metallized contact regions minimally blo...

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Bibliographische Detailangaben
Hauptverfasser:	ONUR FIDANER, MICHAEL W WEEMER, EWELINA N LUCOW, RAN ZHANG
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide: a method for making semiconductor light detection devices, such as solar cells and photodetectors, which minimizes exposure of a front surface field region to contaminants and assures metal-to-cap region alignment so that top metallized contact regions minimally block incident light; and products made using the method.SOLUTION: A semiconductor light detection device fabrication technique is provided in which the cap etch and anti-reflection coating steps are performed in a single, self-aligned lithography module.