ANNULAR CONVEX PART REMOVAL DEVICE

PROBLEM TO BE SOLVED: To provide an annular convex part removal device capable of surely housing an annular convex part removed from a wafer unit in an annular convex part housing part.SOLUTION: The annular convex part removal device for removing an annular convex part from a wafer unit includes an annular convex part housing part for housing an annular convex part removed from the wafer unit by an annular convex part removal mechanism. The annular convex part housing part includes an annular convex part housing case having a bottom face and side faces, and an erection part erected from the bottom face of the annular convex part housing case and having an area smaller than an inner diameter of the annular convex part. When a plurality of pawls are moved to a retreat position with the erection part inserted into the opening of the annular convex part supported by the plurality of pawls, the annular convex part is hooked by the erection part to fall down and then be housed in the annular convex part housing case even though the annular convex part is attached to any pawl with cutting fluid to be moved to the retreat position together with the pawl.