DATA MANAGEMENT DEVICE

PROBLEM TO BE SOLVED: To achieve the management of a production device without adding any alteration or change to an existing production device.SOLUTION: A data management device body part 20 and a branch part 21 are arranged in a semiconductor production device 1. The branch part 21 is inserted int...

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Bibliographische Detailangaben
Hauptverfasser:	MAKINO TORU, TAKEDA KENJI, KATO HIFUMI, ITO TAKATOSHI
Format:	Patent
Sprache:	eng
Schlagworte:	CALCULATING COMPUTING CONTROL OR REGULATING SYSTEMS IN GENERAL CONTROLLING COUNTING ELECTRIC DIGITAL DATA PROCESSING FUNCTIONAL ELEMENTS OF SUCH SYSTEMS MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS PHYSICS REGULATING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To achieve the management of a production device without adding any alteration or change to an existing production device.SOLUTION: A data management device body part 20 and a branch part 21 are arranged in a semiconductor production device 1. The branch part 21 is inserted into a cable 16, and configured to branch data from the port of transmission data TD from a serial interface 14 of a CPU board 13, and to output one data to the port of reception data RD of a serial interface 15 of a display terminal 12, and to output the other data to the port of reception data RD of a serial interface 22 of the data management device body part 20. The display terminal 12 displays information on the basis of the received display information. The data management device body part 20 constructs a management database 30 for managing a production device body part 11 by using the received display information.