MICRO-SCANNER

PROBLEM TO BE SOLVED: To provide a micro-scanner in which a level difference structure is accurately formed between interdigital electrodes with a simple constitution and which enables overall downsizing.SOLUTION: A micro-scanner includes a first interdigital electrode (13a,13b) formed at a free end...

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Bibliographische Detailangaben
Hauptverfasser:	SAWADA YASUSHI, HASHIZUME MAKOTO, HYODO FUMIKI, ISHIKAWA NORIAKI
Format:	Patent
Sprache:	eng
Schlagworte:	MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PERFORMING OPERATIONS PHYSICS TRANSPORTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a micro-scanner in which a level difference structure is accurately formed between interdigital electrodes with a simple constitution and which enables overall downsizing.SOLUTION: A micro-scanner includes a first interdigital electrode (13a,13b) formed at a free end of a reflection mirror (10), a second interdigital electrode (15a,15b) arranged such that the second interdigital electrode (15a,15b) faces the first interdigital electrode (13a,13b) and interdigitals of the interdigital electrodes alternately mesh with each other, a contact portion (19) connected to the second interdigital electrode (15a,15b) via a beam (18), and an electrode part (20) fixedly disposed in a position facing at least one of an upper portion and a lower portion of the contact portion (19). The micro-scanner is configured to generate an electrostatic attraction between the contact portion (19) and the electrode part (20) to displace the contact portion (19).