METHOD AND APPARATUS FOR RECOVERING HYDROFLUORIC ACID

PROBLEM TO BE SOLVED: To provide a method and apparatus for recovering hydrofluoric acid that makes a hydrofluoric acid waste liquid reusable by removing hydrosilicofluoric acid and metal components to a low concentration by simply treating the hydrofluoric acid waste liquid containing the hydrosili...

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Bibliographische Detailangaben
Hauptverfasser: HOSHI SHIGEYUKI, KOMORI HIDEYUKI
Format: Patent
Sprache:eng
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Zusammenfassung:PROBLEM TO BE SOLVED: To provide a method and apparatus for recovering hydrofluoric acid that makes a hydrofluoric acid waste liquid reusable by removing hydrosilicofluoric acid and metal components to a low concentration by simply treating the hydrofluoric acid waste liquid containing the hydrosilicofluoric acid.SOLUTION: The apparatus for recovering hydrofluoric acid includes a nanofiltration means 2 for nanofiltering hydrofluoric acid waste liquid containing the hydrosilicofluoric acid, an anion exchange means 5 for anion-exchanging a filtrate treated in the nanofiltration means 2, and a cation exchange means 6 for cation-exchanging the anion-exchanged liquid treated in the anion exchange means 5. The apparatus may further include a concentrate nanofiltration means for further nanofiltering the concentrate treated in the nanofiltration means 2 and a pipe for mixing the concentrate treated in the concentrate nanofiltration means with the hydrofluoric acid waste liquid to be supplied to the nanofiltration means 2.