SEMICONDUCTOR RELAY DEVICE

PROBLEM TO BE SOLVED: To provide a semiconductor relay device capable of stabilizing the ON/OFF operation time as the relay and increasing the ON/OFF operation speed.SOLUTION: The source of output MOSFETs 5 and 6 are electrically connected to a support substrate 14 of a dielectric isolation chip 10 so that the potential on the support substrate 14 of the dielectric isolation chip 10 can be fixed to the potential on the source of the output MOSFETs 5 and 6. With this, the charge amount which can be accumulated on a capacity Cbetween an active region and a support substrate can be stabilized and electrical connection object of the capacity Cis fixed. Therefore, the ON/OFF operation time as the relay can be stabilized. Also, different from conventional art, since not all capacity Cis disposed in parallel between the gate and the source of the output MOSFETs 5 and 6 and functions as a parasitic capacitance, the ON/OFF operation time as the relay can be increased.