CLUSTER TOOL ARCHITECTURE FOR PROCESSING SUBSTRATE

PROBLEM TO BE SOLVED: To provide an apparatus and a method for processing a substrate by using a multi-chamber processing system (e.g., a cluster tool) in which reliability is increased by increasing the throughput.SOLUTION: A substrate to be processed in a cluster tool 10 has a high repeat possibil...

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Hauptverfasser:	JOHN A BAKER, HARALD HERCHEN, CHARLES CARLSON, JEFFREY HUDGENS, ISHIKAWA TETSUYA, RICK J ROBERTS, MICHAEL RICE, WANG CHONGYANG, BRYAN LEW, LEON VOLFOVSKI, ROBERT LAWRENCE, HELEN R ARMER, QUACH DAVID H, JAY D PINSON, SALEK MOHSEN S, WILLIAM TAYLOR WEAVER
Format:	Patent
Sprache:	eng
Schlagworte:	ACCESSORIES THEREFOR APPARATUS FOR PROCESSING EXPOSED PHOTOGRAPHIC MATERIALS APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USINGWAVES OTHER THAN OPTICAL WAVES APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FORPROJECTING OR VIEWING THEM APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CHAMBERS PROVIDED WITH MANIPULATION DEVICES CINEMATOGRAPHY CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION ORPROCESSING OF GOODS CONTROL OR REGULATING SYSTEMS IN GENERAL CONTROLLING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY FUNCTIONAL ELEMENTS OF SUCH SYSTEMS GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS HAND TOOLS HOLOGRAPHY MANIPULATORS MATERIALS THEREFOR MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS ORIGINALS THEREFOR PERFORMING OPERATIONS PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS PORTABLE POWER-DRIVEN TOOLS REGULATING SEMICONDUCTOR DEVICES TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION TECHNICAL SUBJECTS COVERED BY FORMER USPC TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ARTCOLLECTIONS [XRACs] AND DIGESTS TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINSTCLIMATE CHANGE TRANSPORTING
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Zusammenfassung:	PROBLEM TO BE SOLVED: To provide an apparatus and a method for processing a substrate by using a multi-chamber processing system (e.g., a cluster tool) in which reliability is increased by increasing the throughput.SOLUTION: A substrate to be processed in a cluster tool 10 has a high repeat possibility and a small system footprint. In a cluster tool, fatigue of a robot is reduced by transferring substrates while grouping and processing a group of two or more substrates thereby increasing the system throughput, and also reducing the number of operations when transferring a butch of substrates between processing chambers, and the cost of property right is reduced by increasing the reliability of the system. A method and an apparatus used for increasing the reliability of substrate transfer processing by reducing the stop time of the system are also provided.