VAPOR PHASE GROWTH APPARATUS

PROBLEM TO BE SOLVED: To rotate a susceptor which is stably supported while equalizing the in-plane temperature distribution of the susceptor.SOLUTION: A vapor phase growth apparatus includes: a deposition chamber 1; a shower head 20 supplying a material gas for deposition to the deposition chamber...

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Bibliographische Detailangaben
1. Verfasser:	OKADA TOSHINORI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SEMICONDUCTOR DEVICES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To rotate a susceptor which is stably supported while equalizing the in-plane temperature distribution of the susceptor.SOLUTION: A vapor phase growth apparatus includes: a deposition chamber 1; a shower head 20 supplying a material gas for deposition to the deposition chamber 1; and a heater 6 heating a processed substrate 3 in the deposition chamber 1. Further, the vapor phase growth apparatus includes: a rotary susceptor 4 where the processed substrate 3 is placed in the deposition chamber 1; a support part 11 supporting an edge of the susceptor 4 from below through a heat insulation member 12; and a rotation shaft 5 transmitting a rotation force to the susceptor 4. The rotation shaft 5 has a protruding part at a position offset from a center axis of the rotation shaft 5 in an end part at the susceptor 4 side. The susceptor 4 has a recessed part, to which the protruding part is loosely inserted, on a lower surface.