LIQUID EJECTION HEAD AND LIQUID EJECTING APPARATUS, AS WELL AS PIEZOELECTRIC ELEMENT AND METHOD OF MANUFACTURING THE SAME

PROBLEM TO BE SOLVED: To provide a liquid ejection head and a liquid ejecting apparatus capable of reliably preventing destruction of a piezoelectric element over a long period of time, and to provide the piezoelectric element and a method of manufacturing the same.SOLUTION: The liquid ejection head...

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Bibliographische Detailangaben
1. Verfasser:	GOMI KAZUHIDE
Format:	Patent
Sprache:	eng
Schlagworte:	CORRECTION OF TYPOGRAPHICAL ERRORS ELECTRICITY i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME LINING MACHINES PERFORMING OPERATIONS PRINTING SELECTIVE PRINTING MECHANISMS STAMPS TRANSPORTING TYPEWRITERS
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a liquid ejection head and a liquid ejecting apparatus capable of reliably preventing destruction of a piezoelectric element over a long period of time, and to provide the piezoelectric element and a method of manufacturing the same.SOLUTION: The liquid ejection head includes a pressure generating chamber 12 communicating with a nozzle opening 21, and the piezoelectric element 300 with a piezoelectric layer 70 and an electrode provided in the piezoelectric layer. The piezoelectric element is covered with a protective film 100 containing an aluminum oxide film formed by an ALCVD method.