FILM PEELING DEVICE

PROBLEM TO BE SOLVED: To provide a film peeling device which suppresses impact when peeling an edge portion of a protective film adhered to a plate-like member such as a substrate, thereby preventing a breakage of the substrate and a breakdown of the device, and also facilitates switching on a lot-b...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	MITA MASAKI, OBA SUSUMU, MATSUI TAKAYUKI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS CONVEYING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY HANDLING THIN OR FILAMENTARY MATERIAL HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS,CABLES MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS PACKING PERFORMING OPERATIONS PRINTED CIRCUITS SEMICONDUCTOR DEVICES STORING TRANSPORTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a film peeling device which suppresses impact when peeling an edge portion of a protective film adhered to a plate-like member such as a substrate, thereby preventing a breakage of the substrate and a breakdown of the device, and also facilitates switching on a lot-by-lot basis.SOLUTION: A film peeling device includes: a roller unit 17 having a pair of support members 20 and 21 configured to support a standard pressure roller 15 and an inclined pressure roller 16; and width-direction movement means for moving the roller unit 17 in a width direction of a plate-like member. The width-direction movement means includes: an operation unit 28 that moves the roller unit 17 to an optional position along support rail members 27 and 27; and a control unit to control the operation unit 28.