INSPECTION PROBE, PROBE UNIT AND INSPECTION JIG

PROBLEM TO BE SOLVED: To provide a cost-reduced inspection probe with which an object to be inspected can be inspected efficiently in accordance with fine pitching of electrodes and narrow pitching of an array of the electrodes while suppressing influences on the electrodes of the object to be inspected, a probe unit and an inspection jig.SOLUTION: An inspection probe 11 comprises an insulated substrate 12, a plurality of conductive contact pieces 13 extending outward from edges of the substrate 12, being disposed in parallel and having elasticity, and wiring patterns 14 formed on the substrate 12 and conducted with the contact pieces 13. In the inspection probe 11, when inspecting an object 21 to be inspected, a contact 15 comprised of distal ends of the contact pieces 13 is brought into contact with electrodes 22 of the object 21 to be inspected. The contact pieces 13 and the wiring patterns 14 are formed on the substrate 12 by micro-electromechanical system technologies and the distal end side of the contact piece 13 is bent at a predetermined angle to the surface of the substrate 12.