CHUCK DEVICE AND CHUCK METHOD

PROBLEM TO BE SOLVED: To provide a chuck device and a chuck method that can stably chuck a workpiece with flexibility in a non-contact state.SOLUTION: The chuck device for holding the workpiece W with flexibility includes: a bernoulli chuck mechanism 4 which is located on a vertically upper side of...

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1. Verfasser: MATSUO KENGO
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creator MATSUO KENGO
description PROBLEM TO BE SOLVED: To provide a chuck device and a chuck method that can stably chuck a workpiece with flexibility in a non-contact state.SOLUTION: The chuck device for holding the workpiece W with flexibility includes: a bernoulli chuck mechanism 4 which is located on a vertically upper side of the workpiece W to suck the workpiece W in the non-contact state; and a pair of holding means 10 which are oppositely arranged on a horizontal plane across the bernoulli chuck mechanism 4, holds a side edge Wof the workpiece W floated by the suction force by the bernoulli chuck mechanism 4 and bent by self weight and holds the workpiece W at a curved attitude in which a center part Wis located on the vertically upper side of the side edge W.
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subjects BASIC ELECTRIC ELEMENTS
COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOTDIRECTED TO A PARTICULAR RESULT
DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g.ARRANGEMENTS FOR COPYING OR CONTROLLING
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
MACHINE TOOLS
MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OFPARTICULAR DETAILS OR COMPONENTS
METAL-WORKING NOT OTHERWISE PROVIDED FOR
PERFORMING OPERATIONS
SEMICONDUCTOR DEVICES
TRANSPORTING
title CHUCK DEVICE AND CHUCK METHOD
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