CONVEYANCE ROBOT AND VACUUM DEVICE

PROBLEM TO BE SOLVED: To provide a technology capable of improving throughput and keeping low heights of a conveyance robot and a vacuum device in which the conveyance robot is arranged, in a conveyance robot having a plurality of conveyance mechanisms.SOLUTION: The conveyance robot has an upper conveyance mechanism 1A constituted of first and second upper driving arms 21 and 22 fixed to first and second drive shafts 11 and 12, and a lower conveyance mechanism 1B constituted of lower driving arms 51 and 52 fixed to second and third drive shafts 12 and 13. The first to third drive shafts 11 to 13 are coaxially arranged. The upper conveyance mechanism 1A has a first upper parallel crank mechanism 4 and a second upper parallel crank mechanism 5. The lower conveyance mechanism 1B is constituted of a first lower parallel crank mechanism 6 and a second lower crank mechanism 7.