CHIP ROTATION APPARATUS AND CHIP ROTATION METHOD
PROBLEM TO BE SOLVED: To provide a chip rotation method including a process which unfailingly allows chips to rotate at a desired rotation angle even if the chips are further downsized.SOLUTION: A chip rotation method includes the steps of: preparing electronic component chips 1, each of which has f...
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Zusammenfassung: | PROBLEM TO BE SOLVED: To provide a chip rotation method including a process which unfailingly allows chips to rotate at a desired rotation angle even if the chips are further downsized.SOLUTION: A chip rotation method includes the steps of: preparing electronic component chips 1, each of which has first and second surfaces facing each other; sandwiching the electronic component chips 1 between first and second plates 12, 15 so that the first surfaces contact with a first elastic body layer 14 and the second surfaces contact with a second elastic body layer 17 between the first elastic body layer 14 of the first plate 12 and the second elastic body layer 17 of the second plate 15; relatively moving the first and second plates 12, 15 in the surface direction with a surface direction moving mechanism 19 and moving the first and second plates 12, 15 with the surface direction moving mechanism 19 and a vertical direction moving mechanism 18 according to the rotation locus of the electronic component chips 1 thereby rotating the electronic component chips 1. |
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