PIEZOELECTRIC ELEMENT AND METHOD FOR MANUFACTURING THE SAME

PROBLEM TO BE SOLVED: To provide a highly durable and reliable piezoelectric element that promotes adhesion of films to each other in a laminate formed by lamination of a plurality of piezoelectric films so as to prevent peeling of the films.SOLUTION: In a piezoelectric element (10), a first electrode (14) is formed on a substrate (12), and a first piezoelectric film (16) is formed on the first electrode (14). Further, a metal oxide film (18) is laminated on the first piezoelectric film (16), and a metal film (20) is laminated and formed on the metal oxide film (18). A second piezoelectric film (22) is formed on the metal film (20), and a second electrode (24) is laminated and formed on the second piezoelectric film (22). An intermediate layer (26) is formed by the lamination of the metal film (20) on the metal oxide film (18). It is preferable that the product of the thickness and stress value of the intermediate layer (26) is smaller than 100 N/m.