EXAMINATION OR OBSERVATION DEVICE, AND EXAMINATION OR OBSERVATION METHOD OF SAMPLE

PROBLEM TO BE SOLVED: To provide an examination device, an observation device capable of accurately examining or observing sample with a charged particle technology or an optical technology conveniently.SOLUTION: The determination device or observation device includes: a first housing for forming at...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: OMINAMI YUSUKE, KOI ASAMI, ITO SUKEHIRO, OTAKI TOMOHISA, KASAI SHINSUKE
Format: Patent
Sprache:eng
Schlagworte:
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