EXAMINATION OR OBSERVATION DEVICE, AND EXAMINATION OR OBSERVATION METHOD OF SAMPLE

PROBLEM TO BE SOLVED: To provide an examination device, an observation device capable of accurately examining or observing sample with a charged particle technology or an optical technology conveniently.SOLUTION: The determination device or observation device includes: a first housing for forming at least a part of a first space which becomes at least a part of space in which a primary charged particle beam irradiated from a charged particle irradiation part reaches a sample and can maintain interior thereof in a vacuum state; a second housing for forming at least a part of a second space capable of storing the sample included in the first housing; a partition wall part disposed an axis of the charged particle irradiation part when the primary charged particle beam irradiated from the charged particle irradiation part on the sample, and separating the first space and the second space; and an optical observation part for irradiating the sample with light and detecting the light from the sample from a direction same as the charged particle irradiation part.