CRYOGENIC REFRIGERATOR, CRYOPUMP, AND DISPLACER

PROBLEM TO BE SOLVED: To provide a cryogenic refrigerator, a cryopump, and a displacer that can maintain high reliability irrespective of a change in temperature.SOLUTION: The two-stage GM type cryogenic refrigerator can raise a temperature to reversely rotate a motor M for the drive of displacers 1...

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1. Verfasser: KYO MEIGYO
Format: Patent
Sprache:eng
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Zusammenfassung:PROBLEM TO BE SOLVED: To provide a cryogenic refrigerator, a cryopump, and a displacer that can maintain high reliability irrespective of a change in temperature.SOLUTION: The two-stage GM type cryogenic refrigerator can raise a temperature to reversely rotate a motor M for the drive of displacers 13 and 14 in a direction reverse to the rotary direction when cooling. The displacer 14 on a second stage includes a displacer tube 14A and a resin film 14B formed at its outer periphery so that the thickness of the resin film 14B on the high-temperature side is set to become thinner than that on the low-temperature side.