CRYOGENIC REFRIGERATOR, CRYOPUMP, AND DISPLACER
PROBLEM TO BE SOLVED: To provide a cryogenic refrigerator, a cryopump, and a displacer that can maintain high reliability irrespective of a change in temperature.SOLUTION: The two-stage GM type cryogenic refrigerator can raise a temperature to reversely rotate a motor M for the drive of displacers 1...
Gespeichert in:
1. Verfasser: | |
---|---|
Format: | Patent |
Sprache: | eng |
Schlagworte: | |
Online-Zugang: | Volltext bestellen |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Zusammenfassung: | PROBLEM TO BE SOLVED: To provide a cryogenic refrigerator, a cryopump, and a displacer that can maintain high reliability irrespective of a change in temperature.SOLUTION: The two-stage GM type cryogenic refrigerator can raise a temperature to reversely rotate a motor M for the drive of displacers 13 and 14 in a direction reverse to the rotary direction when cooling. The displacer 14 on a second stage includes a displacer tube 14A and a resin film 14B formed at its outer periphery so that the thickness of the resin film 14B on the high-temperature side is set to become thinner than that on the low-temperature side. |
---|