CHEMICAL SUPPLY DEVICE

PROBLEM TO BE SOLVED: To provide a chemical supply device for minimizing the entry of water into a buffer chamber even in the case of the entry of the water inside from a fitting area between a chemical container and a support.SOLUTION: A chemical supply device 1 includes a chemical container 2 in w...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: NIIZEKI KAZUMA, TERAOKA TAKATOSHI, MATSUMUNE NORIHIKO
Format: Patent
Sprache:eng
Schlagworte:
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