CHEMICAL SUPPLY DEVICE

PROBLEM TO BE SOLVED: To provide a chemical supply device for minimizing the entry of water into a buffer chamber even in the case of the entry of the water inside from a fitting area between a chemical container and a support.SOLUTION: A chemical supply device 1 includes a chemical container 2 in w...

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Bibliographische Detailangaben
Hauptverfasser: NIIZEKI KAZUMA, TERAOKA TAKATOSHI, MATSUMUNE NORIHIKO
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:PROBLEM TO BE SOLVED: To provide a chemical supply device for minimizing the entry of water into a buffer chamber even in the case of the entry of the water inside from a fitting area between a chemical container and a support.SOLUTION: A chemical supply device 1 includes a chemical container 2 in which chemical is stored, and a cup-shaped support 3 having an opening in the upper part. It is assembled by fitting the chemical container 2 to the support 3. The support 3 includes guide means 10 for allowing water entering inside from a fitting area T between the chemical container 2 and the support 3 to flow down along the inner wall face. The guide means 10 is constructed by a plurality of grooves 11 which are provided in the inner wall face of the support 3 extending downward.