TOOL FOR ANODIC BONDING AND METHOD FOR ANODIC BONDING OF BONDED BODY USING THE TOOL

PROBLEM TO BE SOLVED: To provide a tool for anodic bonding that easily and precisely positions bonding members having different outer shapes and to provide an anodic bonding method using the tool.SOLUTION: The tool for anodic bonding includes: a frame-shaped first member having an opening; and a sec...

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Bibliographische Detailangaben
1. Verfasser:	MORII AKIO
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL COMPOSITION OF GLASSES, GLAZES, OR VITREOUSENAMELS CHEMISTRY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY GLASS JOINING GLASS TO GLASS OR OTHER MATERIALS METALLURGY MINERAL OR SLAG WOOL SEMICONDUCTOR DEVICES SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS,MINERALS OR SLAGS SURFACE TREATMENT OF GLASS
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a tool for anodic bonding that easily and precisely positions bonding members having different outer shapes and to provide an anodic bonding method using the tool.SOLUTION: The tool for anodic bonding includes: a frame-shaped first member having an opening; and a second member disposed on the first member, including a bridge girder part installed on the first member so as to straddle the opening in which a thermal expansion coefficient of the bridge girder part is larger than that of the first member.