METHOD FOR PRODUCING FILMY GLASS WITH FILM, FILMY GLASS WITH FILM, METHOD FOR PRODUCING GLASS MATERIAL JOINED BODY, AND GLASS MATERIAL JOINED BODY

PROBLEM TO BE SOLVED: To provide a method for producing filmy glass with a film which has a film formed on both sides of filmy glass and is suppressed from warping.SOLUTION: Filmy glass 1 is held perpendicularly to a surface 2a of a target 2 and has both surfaces 1a, 1b of the filmy glass 1 and film...

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Bibliographische Detailangaben
Hauptverfasser:	NAKAJIMA SOTOHIRO, YAMAGUCHI YOSHIMASA
Format:	Patent
Sprache:	eng
Schlagworte:	CHEMICAL COMPOSITION OF GLASSES, GLAZES, OR VITREOUSENAMELS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL GLASS INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL JOINING GLASS TO GLASS OR OTHER MATERIALS METALLURGY MINERAL OR SLAG WOOL SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS,MINERALS OR SLAGS SURFACE TREATMENT OF GLASS SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a method for producing filmy glass with a film which has a film formed on both sides of filmy glass and is suppressed from warping.SOLUTION: Filmy glass 1 is held perpendicularly to a surface 2a of a target 2 and has both surfaces 1a, 1b of the filmy glass 1 and film-formed while passing over the target 2. Especially, it is preferred that the filmy glass is film-formed by a sputtering method, CVD method, or vacuum deposition method. Further, it is preferred that the filmy glass has both the surface film-formed while circling along a track passing over the target.