CALIXARENE COMPOUND AND PHOTORESIST COMPOSITION COMPRISING THE SAME

CALIXARENE COMPOUND AND PHOTORESIST COMPOSITION COMPRISING THE SAME

PROBLEM TO BE SOLVED: To provide a calix[4]arene-based photoresist which has improved resolution and has high resolution, low LER and processing stability.SOLUTION: A molecular glass compound comprises a tetrameric reaction product of an aromatic compound of formula (I): CR(OR)and a polycyclic or fu...

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Bibliographische Detailangaben
Hauptverfasser: BAILEY BRAD C, GREEN D PATRICK, JAIN VIPUL
Format: Patent
Sprache:eng
Schlagworte:
ACYCLIC OR CARBOCYCLIC COMPOUNDS
CHEMISTRY
HETEROCYCLIC COMPOUNDS
METALLURGY
ORGANIC CHEMISTRY
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Zusammenfassung:PROBLEM TO BE SOLVED: To provide a calix[4]arene-based photoresist which has improved resolution and has high resolution, low LER and processing stability.SOLUTION: A molecular glass compound comprises a tetrameric reaction product of an aromatic compound of formula (I): CR(OR)and a polycyclic or fused polycyclic aromatic aldehyde of formula (II): Ar-CHO, and an acid-removable protecting group as an adduct with the hydroxy group of the aromatic compound, a hydroxy group of the polycyclic or fused polycyclic aromatic aldehyde, or a combination comprising at least one of the foregoing. A photoresist comprises the molecular glass compound. A coated substrate comprises a layer of the photoresist composition.